Atomic Layer Deposition: Principles, Characteristics, and by Tommi Kaariainen, David Cameron, Marja?Leena Kaariainen,

By Tommi Kaariainen, David Cameron, Marja?Leena Kaariainen, Arthur Sherman(auth.)

Because the first version was once released in 2008, Atomic Layer Deposition (ALD) has emerged as a robust, and occasionally hottest, deposition expertise. the recent version of this groundbreaking monograph is the 1st textual content to check the topic of ALD comprehensively from a realistic viewpoint. It covers ALD's software to microelectronics (MEMS) and nanotechnology; many very important new and rising functions; thermal strategies for ALD progress of nanometer thick movies of semiconductors, oxides, metals and nitrides; and the formation of natural and hybrid materials.Content:
Chapter 1 basics of Atomic Layer Deposition (pages 1–31):
Chapter 2 Elemental Semiconductor Epitaxial movies (pages 33–49):
Chapter three III?V Semiconductor motion pictures (pages 51–66):
Chapter four Oxide motion pictures (pages 67–159):
Chapter five Nitrides and different Compounds (pages 161–182):
Chapter 6 Metals (pages 183–206):
Chapter 7 natural and Hybrid fabrics (pages 207–213):
Chapter eight ALD functions and (pages 215–242):

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Additional resources for Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications, Second Edition

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George, V. Kuznetsov, G. N. Parsons, F. Roozeboom, G. Sundaram, A. Vermeer, J. Vac. Sci. Technol. A 30, 010802 © 2012, American Vacuum Society. 16 A photograph of Beneq’s WCS 500 roll-to-roll ALD reactor. Photo courtesy and Copyright Beneq Oy 2013. 500 mm wide web based on this principle has been developed by Beneq Oy. 16. ALD coating head is situated below the processing drum. References 1. A. , New Jersey, 1987. 2. J. J. Giling, Mechanisms of the Chemical Vapor Deposition of Silicon, in Current Topics in Materials Science, Vol.

10. With disilane, the respective temperatures were 400°C (low) and 550°C (high). 11. 3 monolayers/cycle. The growth rate was also stable over the (low) deposition temperature range from 350°C to 450°C. Above 500°C it increased rapidly because of CVD reactions. 10 Thickness per cycle vs. temperature [11]. © 1991 The Japan Society of Applied Physics. 11 Temperature cycling profile [15] Reprinted from J. Cryst. Growth 209, J. Nishizawa, A. Murai, T. Ohizumi, T. Kurabayashi, K. Ohtsuka, T. Yoshida, Observation and control of surface reaction during Si molecular layer growth, 327 © (2000), with permission from Elsevier.

Aoki, S. Suzuki, K. Kikuchi, Silicon Molecular Layer Epitaxy, 1898, © 1990, Reproduced by permission of ECS – The Electrochemical Society. 133 Pa) and held there for 40 seconds. 3 mtorr and held for 10 seconds, before being evacuated in 7 seconds. The total cycle time is 60 seconds. Deposition is generally carried out by operating over a fixed number of cycles, and the deposition rate in Å/cycle can then be calculated once the film thickness is measured. 4 Å for Si(001)), we can determine if the deposition rate is indeed a monolayer for each cycle.

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